Development of the Micro Heat Pump System

In the past decades, microelectronic technology has §changed our life dramatically. §Microelectromechanical systems (MEMS) is believed to §bring us the same revolution in this century. Heat §and mass transfer in micro systems is one of the §foundations of MEMS, which is still not well §understood and is being studied all over the world. §Micro heat pump system is an important and §interesting application of MEMS. It is expected to §be used as portable cooling systems for workers in §hazardous environments, distributed cooling systems §in buildings for individual thermal comfort control §and energy saving, cooling systems for micro §electronic devices, etc. This book presents the §experimental and theoretical studies on the key §micro devices for the development of a micro heat §pump system. Heat and mass transfer as well as the §fabricating process of micro condensers, micro §electroosmotic pumps and micro channels are studied. §A micro heat pump system was finally developed. This §book should be useful for the researchers and §manufacturers to understand the heat and mass §transfer in micro systems and to develop micro heat §pump systems.