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Plasma Electronics

Applications in Microelectronic Device Fabrication

Language EnglishEnglish
E-book Adobe ePub DRM
Publishers CRC Press, August 2014
Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed... Full description
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Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental

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About the book

Full name Plasma Electronics
Author Toshiaki Makabe, Zoran Lj. Petrovic
Language English
Binding E-book - Adobe ePub DRM
Date of issue 2014
Number of pages 412
EAN 9781040220405
Libristo code 47538625
Publishers CRC Press

Categories

Mathematics & Science > Physics > Materials / States of matter > Plasma physics
Mathematics & Science > Physics > Applied physics
Technology, Engineering, Agriculture > Energy technology & engineering > Electrical engineering
Technology, Engineering, Agriculture > Electronics & communications engineering > Electronics engineering
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