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Rapid Thermal Processing

Science and Technology

Language EnglishEnglish
E-book Adobe ePub DRM
E-book Rapid Thermal Processing Richard B. Fair
Libristo code: 39665096
Publishers Academic Press, December 2012
This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing tech... Full description
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This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

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About the book

Full name Rapid Thermal Processing
Author Richard B. Fair
Language English
Binding E-book - Adobe ePub DRM
Date of issue 2012
Number of pages 430
EAN 9780323139809
Libristo code 39665096
Publishers Academic Press

Categories

Technology, Engineering, Agriculture > Mechanical engineering & materials > Materials science > Engineering thermodynamics
Technology, Engineering, Agriculture > Electronics & communications engineering > Electronics engineering > Electronics: circuits & components
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