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Silicon Carbide Microelectromechanical Systems For Harsh Environments

Name: Silicon Carbide Microelectromechanical Systems For Harsh Environments
Brand: Imperial College Press
SKU: 05121835
Price: 47450 HUF
Availability: InStock
Author: Cheung
ISBN: 9781860946240

Cheung

Rebecca (Univ Of Edinburgh

Uk)

Language

English

Book Hardback

Libristo code: 05121835

Publishers Imperial College Press, June 2006

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanica... Full description

Libristo code: 05121835

314 b

47 450 Ft

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This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product.