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Process development for nanostructuring and 3D micro/nanointegration

Name: Process development for nanostructuring and 3D micro/nanointegration
Brand: Sudwestdeutscher Verlag Fur Hochschulschriften AG
SKU: 09187233
Price: 17894 HUF
Availability: InStock
Author: Senn Tobias
ISBN: 9783838150284

Senn Tobias

Language

English

Book Paperback

Libristo code: 09187233

Publishers Sudwestdeutscher Verlag Fur Hochschulschriften AG, January 2015

Micro- and Nanostructures significantly influence the physical and chemical properties of surfaces.... Full description

Libristo code: 09187233

123 b

17 894 Ft

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Micro- and Nanostructures significantly influence the physical and chemical properties of surfaces. Therefore, such structures can be used to functionalize surfaces and adjust the surface properties to the specific requirements of a certain application. A remaining challenge is the integration of functional structures into micro devices to achieve e.g. patterning in 3D, 3D surface structures and sidewall patterning. This work is focused on the development of processes to achieve both, the accurate replication of micro and nanostructures as well as the integration of functional surface structures into micro devices.