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Predictive Simulation of Semiconductor Processing

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Language EnglishEnglish
Book Hardback
Book Predictive Simulation of Semiconductor Processing Jarek Dabrowski
Libristo code: 01558777
Publishers Springer-Verlag Berlin and Heidelberg GmbH & Co. KG, May 2004
Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the s... Full description
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Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

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About the book

Full name Predictive Simulation of Semiconductor Processing
Author Jarek Dabrowski, Eicke R. Weber
Language English
Binding Book - Hardback
Date of issue 2004
Number of pages 490
EAN 9783540204817
ISBN 3540204814
Libristo code 01558777
Publishers Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Weight 1028
Dimensions 155 x 235 x 36

Categories

Technology, Engineering, Agriculture > Mechanical engineering & materials > Materials science > Testing of materials
Technology, Engineering, Agriculture > Electronics & communications engineering > Electronics engineering > Electronic devices & materials
Mathematics & Science > Physics > Mathematical physics
Technology, Engineering, Agriculture > Technology: general issues > Engineering: general
Technology, Engineering, Agriculture > Technology: general issues > Nanotechnology
Technology, Engineering, Agriculture > Mechanical engineering & materials > Engineering skills & trades
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