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Plasma Electronics

Applications in Microelectronic Device Fabrication

Language EnglishEnglish
Book Hardback
Book Plasma Electronics Zoran Lj. Petrovic
Libristo code: 06713137
Publishers Apple Academic Press Inc., August 2014
Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed... Full description
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Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Elect

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About the book

Full name Plasma Electronics
Language English
Binding Book - Hardback
Date of issue 2014
Number of pages 412
EAN 9781482222050
ISBN 9781482222050
Libristo code 06713137
Weight 920
Dimensions 156 x 235 x 25
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