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Optical Lithography

Here is Why

Language EnglishEnglish
Book Paperback
Book Optical Lithography Burn Jeng Lin
Libristo code: 06360759
Publishers SPIE Press, April 2010
Helps readers gain knowledge of the basic equations and constants that drive optical lithography, le... Full description
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Helps readers gain knowledge of the basic equations and constants that drive optical lithography, learn the basics of exposure systems and image formation, and come away with an understanding of system components, processing, and optimization. This book is suitable for engineers, technology managers, and senior technicians.

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About the book

Full name Optical Lithography
Author Burn Jeng Lin
Language English
Binding Book - Paperback
Date of issue 2010
Number of pages 500
EAN 9780819475602
ISBN 9780819475602
Libristo code 06360759
Publishers SPIE Press
Weight 1182

Categories

Technology, Engineering, Agriculture > Other technologies & applied sciences > Applied optics
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