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Modelling of Microfabrication Systems

Name: Modelling of Microfabrication Systems
Brand: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
SKU: 01556029
Price: 61049 HUF
Availability: InStock
Author: R. Nassar
ISBN: 9783540002529

R. Nassar

W. Dai

Language

English

Book Hardback

Libristo code: 01556029

Publishers Springer-Verlag Berlin and Heidelberg GmbH & Co. KG, June 2003

This book addresses modeling of systems that are important to the fabrication of three-dimensional m... Full description

Libristo code: 01556029

406 b

61 049 Ft

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This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illustrated, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications.