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Microsystem Technology and Microrobotics

Language EnglishEnglish
Book Hardback
Book Microsystem Technology and Microrobotics Sergej Fatikow
Libristo code: 01566064
Publishers Springer-Verlag Berlin and Heidelberg GmbH & Co. KG, March 1997
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic,... Full description
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Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

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About the book

Full name Microsystem Technology and Microrobotics
Author Sergej Fatikow, Ulrich Rembold
Language English
Binding Book - Hardback
Date of issue 1997
Number of pages 408
EAN 9783540606581
ISBN 3540606580
Libristo code 01566064
Publishers Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Weight 1710
Dimensions 156 x 234 x 27

Categories

Technology, Engineering, Agriculture > Electronics & communications engineering > Electronics engineering > Automatic control engineering > Robotics
Reference, Information & Interdisciplinary subjects > Research & information: general > Information theory > Cybernetics & systems theory
Computing & Information Technology > Computer science > Computer architecture & logic design
Computing & Information Technology > Computer science > Artificial intelligence
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