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Language
English
English
Book
Hardback
Details the techniques, technologies, and materials involved in designing and fabricating MEMS devic...
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Libristo code: 06705780
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Details the techniques, technologies, and materials involved in designing and fabricating MEMS devices. This volume offers an overview of MEMS materials and examines various fabrication and manufacturing methods, including LIGA and macromolding, X-ray based fabrication, EFAB[registered] technology, and deep reactive ion etching.
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About the book
Full name
MEMS
Author
Mohamed Gad-El-Hak
Language
English
English
Binding
Book - Hardback
Date of issue
2005
Number of pages
664
EAN
9780849391385
ISBN
9780849391385
Libristo code
06705780
Publishers
Taylor & Francis Inc
Weight
1153
Dimensions
178 x 254 x 37
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