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Materials Processing by Cluster Ion Beams

History, Technology, and Applications

Language EnglishEnglish
Book Hardback
Book Materials Processing by Cluster Ion Beams Isao Yamada
Libristo code: 09401713
Publishers Taylor & Francis Inc, August 2015
Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the conte... Full description
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Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing.

Written by the originator of the gas cluster ion beam (GCIB) concept, this book:

  • Offers an overview of ion beam technologies, from the discovery of monomer ions to the introduction of GCIBs
  • Explores the development of sources for producing cluster beams from solid materials
  • Describes the engineering characteristics of gas cluster ion beam equipment
  • Covers cluster ion-solid surface interaction kinetics as well as sputtering, implantation, and ion-assisted deposition
  • Details surface processing techniques for smoothing, shallow implantation, and preparation of high-quality thin films
  • Introduces representative examples of emerging GCIB industrial applications

Materials Processing by Cluster Ion Beams: History, Technology, and Applications provides a deeper understanding of the importance of cluster ion beams and their applications.

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About the book

Full name Materials Processing by Cluster Ion Beams
Author Isao Yamada
Language English
Binding Book - Hardback
Date of issue 2015
Number of pages 260
EAN 9781498711753
ISBN 9781498711753
Libristo code 09401713
Weight 528
Dimensions 241 x 163 x 20
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