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Ion-Solid Interactions for Materials Modification and Processing: Volume 396

Language EnglishEnglish
Book Hardback
Book Ion-Solid Interactions for Materials Modification and Processing: Volume 396 Yang-Tse ChengLloyd R. HarriottDaryush IlaDavid B. Poker
Libristo code: 02060057
Publishers Materials Research Society, May 1996
Several beam-solid interaction techniques have been developed that can either stand alone or be used... Full description
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Several beam-solid interaction techniques have been developed that can either stand alone or be used in connection with others for materials processing, for fabrication of devices with enhanced electro-optical and mechanical properties, and with enhanced resistance to corrosion and erosion. For example, advances in focused ion beams (FIB) have brought out-of-reach ideas and applications to fruition. This book from MRS focuses on the developments in ion-beam-assisted processing of materials and reviews successful applications of the techniques. Topics include: fundamentals of ion-solid interactions; ion-beam mixing; radiation damage; insulators and wide bandgap materials; polymers; optical materials; plasma and ion-assisted techniques; metals and tribology; focused ion beams; fundamental semiconductor processing and compound semiconductors.

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About the book

Full name Ion-Solid Interactions for Materials Modification and Processing: Volume 396
Language English
Binding Book - Hardback
Date of issue 1996
Number of pages 897
EAN 9781558992993
ISBN 1558992995
Libristo code 02060057
Weight 1432
Dimensions 163 x 234 x 53
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