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Helium Ion Microscopy

Name: Helium Ion Microscopy
Brand: Springer International Publishing AG
SKU: 19755691
Price: 69159 HUF
Availability: InStock
Author: GREGOR HLAWACEK
ISBN: 9783319824734

GREGOR HLAWACEK

Language

English

Book Paperback

Libristo code: 19755691

Publishers Springer International Publishing AG, June 2018

This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source... Full description

Libristo code: 19755691

462 b

69 159 Ft

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This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.