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Crucial Issues in Semiconductor Materials and Processing Technologies

Name: Crucial Issues in Semiconductor Materials and Processing Technologies
Brand: Springer
SKU: 01393899
Price: 81176 HUF
Availability: InStock
Author: S. Coffa
ISBN: 9780792320036

Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies Erice, Italy 1-13 July 1991

Language

English

Book Hardback

Libristo code: 01393899

Publishers Springer, October 1992

Semiconductors lie at the heart of some of the most important industries and technologies of the twe... Full description

Libristo code: 01393899

541 b

81 176 Ft

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Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. Particular emphasis is placed upon silicon, but compound semiconductors and photonic materials are also highlighted. The fundamental concepts of phase stability, interfaces and defects play a key role in understanding these crucial issues. These concepts are reviewed in a crucial fashion.