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Books in English > Technology, Engineering, Agriculture > Mechanical engineering & materials > Production engineering > Industrial quality control > CMOS Gate-Stack Scaling - Materials, Interfaces and Reliability Implications: Volume 1155

CMOS Gate-Stack Scaling - Materials, Interfaces and Reliability Implications: Volume 1155

Name: CMOS Gate-Stack Scaling - Materials, Interfaces and Reliability Implications: Volume 1155
Brand: Materials Research Society
SKU: 02060485
Price: 47592 HUF
Availability: InStock
Author: Alexander A. DemkovBill TaylorH. Rusty HarrisJeffery W. Butterbaugh
ISBN: 9781605111285

Alexander A. DemkovBill TaylorH. Rusty HarrisJeffery W. Butterbaugh

Language

English

Book Hardback

Libristo code: 02060485

Publishers Materials Research Society, November 2009

To address the increasing demands of device scaling, new materials are being introduced into convent... Full description

Libristo code: 02060485

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To address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k/metal gate (basic physical models, charge trapping, etc.), while others cover characterization of the thin films and interfaces which comprise the gate stack. Topics include: advanced Si-based gate stacks; and alternate channel materials.