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CMOS Cantilever Sensor Systems

Name: CMOS Cantilever Sensor Systems
Brand: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
SKU: 01652833
Price: 40647 HUF
Availability: InStock
Author: D. Lange
ISBN: 9783642077289

Atomic Force Microscopy and Gas Sensing Applications

D. Lange

O. Brand

H. Baltes

Language

English

Book Paperback

Libristo code: 01652833

Publishers Springer-Verlag Berlin and Heidelberg GmbH & Co. KG, December 2010

This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantil... Full description

Libristo code: 01652833

271 b

40 647 Ft

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This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.