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Characterization in Silicon Processing

Name: Characterization in Silicon Processing
Brand: Momentum Press
SKU: 01220120
Price: 44030 HUF
Availability: PreOrder
Author: Strausser
ISBN: 9781606501092

Strausser

Language

English

Book Hardback

Libristo code: 01220120

Publishers Momentum Press, February 2010

With a focus on the use of materials characterization techniques for silicon-based semiconductors, t... Full description

Libristo code: 01220120

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With a focus on the use of materials characterization techniques for silicon-based semiconductors, this volume in the Materials Characterization series focuses on the process flow of silicon wafer manufacture where materials properties, processing and associated problems are brought to the fore. The book is organized by the types of materials commonly associated with integrated silicon semiconductor circuits and the typical processes involved for each such material, including deposition, thermal treatment, and lithography. Readers will find features such as:§The essential processes of Silicon Epitaxial §Growth Coverage of Polysilicon Conductors, Silicides, Aluminum and Copper-based Conductors, Tungsten-based Conductors §Concise summaries of major characterization technologies for silicon and related semiconductor materials, including Auger Electron Spectroscopy, Energy-Dispersive X-Ray Spectroscopy, Neutron Activation Analysis and Raman Spectroscopy