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Language EnglishEnglish
Book Paperback
Book Beam Technologies for Integrated Processing Committee on Beam Technologies: Opportunities in Attaining Fully Integrated Processing Systems
Libristo code: 04576112
Publishers National Academies Press, January 1992
Beam technologies play an important role in microelectronic component fabrication and offer opportun... Full description
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Beam technologies play an important role in microelectronic component fabrication and offer opportunities for application in other manufacturing schemes. Emerging beam technologies that incorporate potential for sensors, control, and information processing have created new opportunities for integrated processing of materials and components. This volume identifies various beam technologies and their applications in electronics and other potential manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented.

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About the book

Full name Beam Technologies for Integrated Processing
Language English
Binding Book - Paperback
Date of issue 1992
Number of pages 106
EAN 9780309046350
ISBN 0309046351
Libristo code 04576112
Weight 301
Dimensions 216 x 279
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