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Atomic Layer Deposition for Semiconductors

Name: Atomic Layer Deposition for Semiconductors
Brand: Springer-Verlag New York Inc.
SKU: 13809644
Price: 68958 HUF
Availability: InStock
Author: Cheol Seong Hwang
ISBN: 9781489979438

Cheol Seong Hwang

Language

English

Book Paperback

Libristo code: 13809644

Publishers Springer-Verlag New York Inc., August 2016

This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, mov...

Libristo code: 13809644

460 b

68 958 Ft

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This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines.