Check order status
LIBRISTO
LIBROAMANTO
mandatory
Forgotten password
Become part of a community of book lovers from all over the world and get access to a whole bunch of benefits. Create an account for free
0
Free delivery for purchases over 19 990 Ft
DPD point 990 Ft DPD courier 1 190 Ft GLS point 1 190 Ft Hungarian Post 1 795 Ft Hungarian Post 1 690 Ft Hungarian Post 1 690 Ft FoxPost 1 190 Ft Packeta point 1 190 Ft GLS courier 1 690 Ft
phone Contact phoneHow to shop
Free shipping on orders over 19,990 Ft via Packeta, Fox Post Box, and DPD Collection Point

Advances in Chemical Mechanical Planarization (CMP)

Language EnglishEnglish
Book Hardback
Book Advances in Chemical Mechanical Planarization (CMP) Suryadevara Babu
Libristo code: 09927831
Publishers Elsevier Science & Technology, January 2016
Advances in Chemical Mechanical Planarization (CMP) provides the latest information on a mainstream... Full description
? points 755 b
113 408 Ft
In stock at our supplier Shipping in 10-18 days

Up to 30 days for returns

Customers also purchased

Million Days Katy Raze / Book Paperback
common.buy 3 632 Ft
La BéréZina Marylou Magal / Book Paperback
common.buy 8 139 Ft
La Turquie Ali Kazancigil / Book Paperback
common.buy 4 640 Ft
Quart de frère, quart de soeur - tome 2 Mon pire anniversaire Sophie Adriansen / Book Paperback
common.buy 4 806 Ft
Efficienza del fosforo nel pisello piccione Jitender Kumar Sandooja / Book Paperback
common.buy 19 806 Ft
Processus 4 - Production et analyse de l'information financière Les Processus Livre du professeur Anne Jarry / Book Paperback
common.buy 11 307 Ft
Atlas du monde illustré - Documentaires en autocollants Sam Lake / Book Paperback
common.buy 4 399 Ft
Vamos al cole! Gina de la Rosa / Book Paperback
common.buy 7 055 Ft
Top
Pons German series / Book Paperback
common.buy 2 221 Ft
heutige Volksglaube und das alte Heidentum Friedrich Leberecht Wilhelm Schwartz / Book Paperback
common.buy 9 806 Ft
Aceite de Palma Yagua (Attalea Butyracea) En Dietas Para Cerdos Roseliano Sánchez Blanco / Book Paperback
common.buy 10 332 Ft
Wunderläuferland Kenia Jan Fitschen / Book Hardback
common.buy 10 029 Ft
Leben und Reisen der ersten englischen Seefahrer Drake, Cavendish und Dampier Diezmann / Book Hardback
common.buy 21 217 Ft
Gilded Reverie Lenormand, m. 1 Buch, m. 47 Beilage, Lenormand-Karten Ciro Marchetti / Printed items Cards
common.buy 8 106 Ft
La poesia e la morale. Appunti inediti (1902-1911) Konstantinos Kavafis / Book Paperback
common.buy 5 526 Ft
Die Dunklen Mächte - Lady Midnight Cassandra Clare / Book Paperback
common.buy 3 632 Ft
Lonely Planet Polish Phrasebook & Dictionary Lonely Planet / Book Paperback
common.buy 2 145 Ft
Histoire Du Bas-Empire Depuis Constantin Jusqu'a La Prise De Constantinople En 1453 V2 (1814) Jacques-Corentin Royou / Book Paperback
common.buy 15 720 Ft
Les Secrets Des Coulisses Des Theatres De Paris: Mysteres, Moeurs, Usages, Anecdotes (1865) Joachim Duflot / Book Paperback
common.buy 11 653 Ft

Advances in Chemical Mechanical Planarization (CMP) provides the latest information on a mainstream process that is critical for high-volume, high-yield semiconductor manufacturing, and even more so as device dimensions continue to shrink. The technology has grown to encompass the removal and planarization of multiple metal and dielectric materials and layers both at the device and the metallization levels, using different tools and parameters, requiring improvements in the control of topography and defects. This important book offers a systematic review of fundamentals and advances in the area. Part One covers CMP of dielectric and metal films, with chapters focusing on the use of particular techniques and processes, and on CMP of particular various materials, including ultra low-k materials and high-mobility channel materials, and ending with a chapter reviewing the environmental impacts of CMP processes. Part Two addresses consumables and process control for improved CMP, and includes chapters on the preparation and characterization of slurry, diamond disc pad conditioning, the use of FTIR spectroscopy for characterization of surface processes, and approaches for defection characterization, mitigation, and reduction. Considers techniques and processes for CMP of dielectric and metal filmsIncludes chapters devoted to CMP for particular materialsAddresses consumables and process control for improved CMP

Actress & Polyglot
EWA KASP for
Play video
Ewa Kasp
Libristo has the largest selection of foreign-language books. That’s why I buy my books there.

About the book

Full name Advances in Chemical Mechanical Planarization (CMP)
Author Suryadevara Babu
Language English
Binding Book - Hardback
Date of issue 2016
Number of pages 536
EAN 9780081001653
ISBN 0081001657
Libristo code 09927831
Publishers Elsevier Science & Technology
Weight 690
Dimensions 152 x 229 x 30

Categories

Technology, Engineering, Agriculture > Electronics & communications engineering > Electronics engineering > Electronics: circuits & components
Technology, Engineering, Agriculture > Mechanical engineering & materials > Materials science
Give this book today
It's easy
1 Add to cart and choose Deliver as present at the checkout 2 We'll send you a voucher 3 The book will arrive at the recipient's address

You might also be interested in

Top
Storm of Steel Ernst Junger / Book Paperback
common.buy 6 321 Ft
Understanding and Developing Theological Education Bernhard Ott / Book Paperback
common.buy 19 518 Ft
Mandarin Competence of Chinese-English Bilingual Preschoolers Hock Huan Goh / Book Hardback
common.buy 40 659 Ft
Precarious Modernities Cristiana Strava / Book Hardback
common.buy 47 506 Ft
Advanced Creative Draping KIISEL KAROLYN / Book Paperback
common.buy 22 193 Ft
Sewing Clothes for Barbie Annabel Benilan / Book Paperback
common.buy 5 734 Ft
The Autobiography of Madame Guyon Jeanne Marie Bouvier De La Motte Guyon / Book Paperback
common.buy 4 039 Ft
The Official US Army Tactics Handbook: Offense and Defense: Updated Current Edition: Full-Size Format - Giant 8.5" x 11" - Faster, Stronger, Smarter - US Army / Book Paperback
common.buy 7 746 Ft
In the Night Garden: Little Learning Library In the Night Garden / Book Board book
common.buy 2 974 Ft
Top
Mother Ghost: Nursery Rhymes for Little Monsters Rachel Kolar / Book Hardback
common.buy 5 436 Ft
Top
Count Your Lucky Stars Alexandria Bellefleur / Book Paperback
common.buy 4 176 Ft
Macramé 2 Fanny Zedenius / Book Paperback
common.buy 7 358 Ft
Coding for Kids: Python: Learn to Code with 50 Awesome Games and Activities Adrienne Tacke / Book Paperback
common.buy 6 307 Ft
Lost Ten Harry Sidebottom / Book Paperback
common.buy 3 438 Ft
WSW A VOYAGE IN THAT DIRECTION Robert Elwes / Book Hardback
common.buy 12 387 Ft
Dog Man: A Graphic Novel (Dog Man #1): From the Creator of Captain Underpants: Volume 1 Dav Pilkey / Book Hardback
common.buy 7 780 Ft
Jennyanydots T. S. Eliot / Book Paperback
common.buy 3 064 Ft
Agile Project Management For Dummies 3e Mark C. Layton / Book Paperback
common.buy 17 642 Ft
Mexican Karismata Ellen Gunnarsdottir / Book Hardback
common.buy 32 013 Ft
Top
Modernist Cuisine:The Art and Science of Cooking MYHRVOLD NATHAN / Book Hardback
common.buy 209 746 Ft
Top
The Once and Future Witches HARROW ALIX E / Book Hardback
common.buy 9 247 Ft
Top
Back to the Future: Magnetic Hoverboard Running Press / Book Paperback
common.buy 4 489 Ft
Coming soon
Travel by Design Michael Boodro / Book Hardback
common.buy 51 005 Ft
Japanese Design Since 1945 Naomi Pollock / Book Paperback
common.buy 22 373 Ft

Login

Log in to your account. Don't have a Libristo account? Create one now!

 
mandatory
mandatory
Forgotten password

Don’t have an account? Discover the benefits of having a Libristo account!

With a Libristo account, you'll have everything under control.

Create a Libristo account
Book advisor Libroamiko
Hi, I'm Libroamiko, can I help?